APPARATUS FOR OBSERVATION USING CHARGED PARTICLE BEAMS AND METHOD OF SURFACE OBSERVATION USING CHARGED PARTICLE BEAMS.

摘要

A beam of primary particles is focussed on an inspected element and an excitation unit produces a strong magnetic field near the inspected element in order to assist removal of secondary particles. A foccussing lens is positioned so that a point of focus of secondary particles which will hypothetically be emitted from the surface of the inspected element lies between the focusing lens itself and the inspected element.