| 摘要 |
PURPOSE:To obtain a system which can access the surface state of a body in a wide area with resolution of atom order by mounting the body to be measured, etc., on an XYZ stage and positioning the surface of the body to be measured relatively to a probe. CONSTITUTION:A sample as the body to be measured is mounted on a sampling fitting base 4. Then when the body is positioned in an X- or Y-axial direction, an X- or Y-axial actuator 6 or 1 generates a thrust to drive an X or Y table 8 or 14. The movement quantities of those tables 8 and 14 are detected by X- and Y-axial mirrors 10 and 11, etc., and fed back to a control circuit which inputs manipulated variables to the actuators 6 and 1. Further, a Z-axial actuator 13 moves a wedgelike Z-axial driving mechanism 12 to move up and down a tap table 5, thereby positioning the body perpendicularly. Thus, the object is mounted on the XY stage capable of moving in three axial directions and then the sample can be positioned at one point in the movement range of a fine moving mechanism.
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