Resonant element force transducer for acceleration sensing

摘要

A resonant element force transducer comprising a doubled back beam comprising a single transducer element having a crossmember to one side of which there extends integrally formed therewith at least a pair of coplanar outer beams of substantially equal length and at least one inner beam coplanar with and disposed between the outer beams in substantially parallel fashion, the free ends of the outer beams being coupled to one of a first mounting pad and a second mounting pad, the free end of the at least one inner beam being coupled to the other of the first and second mounting pads.