| 摘要 |
PURPOSE:To perform length measurement with a larger stroke and higher accuracy by putting different length measuring means in charge of large-stroke length measurement covering the entire specific length measurement range and small-stroke, high-accuracy length measurement as to a range corresponding to part of this length measurement area. CONSTITUTION:A small-stroke Y stage YFS is mounted on a base DFS for a small-stroke stage movably along a guide YFG and a small-stroke X stage XFS is mounted on the Y stage YFS movably along an (x)-directional guide XFG. Then an optical probe LP for machining and measurement is fixed to the X stage XFS. The position of the optical probe LP is detected by a high- accuracy length measuring instrument (y)-coordinate detection and a length measuring instrument MX for (x)-coordinate detection. The coordinates of the base DFS, on the other hand, is measured by a laser interference length measuring instrument as the position of the large-stroke stages XS and YS. |
