| 摘要 |
PURPOSE:To automatically and efficiently adjust impedance, by mounting a detection part for separating the impedance of a probe head into a real part and an imaginary part to detect the same as voltages and a control part for adjusting each of the voltages to zero. CONSTITUTION:A detection part 7 is connected between an oscillator 1 and a probe head 6, and a control part 8 is connected between the detection part 7 and the probe head 6. The detection part 7 separates the impedance of the probe head 6 into a real part (Re) and an imaginary part (Im) to detect the same as voltages. When the real part voltage is positive, the control part 8 applies negative feedback to the variable condenser C2 of the probe head 6 so as to reduce the value of said voltage and, when the real part voltage is negative, the control part 8 applies negative feedback so as to increase said value. The control part 8 applies negative feedback to the variable condenser of the probe head 6 when the imaginary part voltage is positive so as to reduce the value of said voltage and applies negative feedback when the imaginary part voltage is negative so as to increase said value to adjust the voltage to voltage O(V). By this method, impedance can be adjusted automatically.
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