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发明名称
摘要
申请公布号	JPS63172951(U)	申请公布日期	1988.11.10
申请号	JP19870064104U	申请日期	1987.04.30
申请人		发明人
分类号	G01R31/24;G01N27/62;H01J49/02;(IPC1-7):G01N27/62	主分类号	G01R31/24
代理机构		代理人
主权项
地址

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