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发明名称
摘要
申请公布号
JPS63172080(U)
申请公布日期
1988.11.09
申请号
JP19870065637U
申请日期
1987.04.28
申请人
发明人
分类号
G01R31/26;H01L21/66;H01R33/74;(IPC1-7):H01R33/74
主分类号
G01R31/26
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代理人
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