FORMATION OF THIN TIN FILM

摘要

PURPOSE:To uniformly form a lustrous thin tin film on a cylindrical or columnar body of a small diameter by placing the body in the dark space of an electric discharge region in which plasma polymn. is caused and by plasma-polymerizing an organotin compd. CONSTITUTION:A cylindrical or columnar body 14 of a small diameter is placed in the dark space 12 of an electric discharge region in which plasma polymn. is caused on a substrate electrode 11. High frequency power is impressed at >=0.34W/cm<2> power density to plasma-polymerize an organotin compd. Thus, a lustrous thin tin film is uniformly formed on the cylindrical or columnar body 4.