WAFER TRANSFER DEVICE

摘要

PURPOSE:To cut down the conveying period and to contrive miniaturization of a wafer conveying device by a method wherein a loader part and an unloader part are connected to both surfaces of the preparatory chamber where wafers are belt- conveyed, and a double-transfer arm, with which the wafers will be delivered between the intermediate part of said preparatory chamber and chamber and a wafer-processing part, is provided. CONSTITUTION:A conveying belt is provided between positions 2a and 2b, and also between positions 2d and 2g, and a structure, in which wafers can be transferred simultaneously between the positions 2d and 2h and also between positions 2h and 3a using the double transfer arm equipped with a feeding arm 8 and a pick-out arm 9, is provided. The original point is detected while a susceptor 5 is being rotated for carrying out of the wafer in the state wherein eleven processed wafers are on the susceptor 5. In parallel with said processed wafers, the wafers not yet processed are conveyed from one of the positions 1a, 1b and 1c, and it is conveyed to the position 2d. When an arm cam is half-rotated, the water on the position 3a is transferred to the position 2h' by the pick-out arm 9. When a feeding arm 8 is moved interlocking with the pick-out arm 9, the wafer at the position 2h is transferred to the position 3a. In parallel with the abovementioned process, the next wafer is transferred to the position 2d from the loader, and an orientation flat positioning is performed.