| 摘要 |
<p>PURPOSE:To get rid of any measuring failure in an actual flow rate, by comparing each output value out of plural flow measuring parts installed in a pipeline, and detecting the mass flow abnormality. CONSTITUTION:A flow control valve 11 is installed in the point midway in a pipeline 1, and each of flow measuring parts A and A is set up in front and in the rear of this valve. The flow measuring part A has a laminar flow element 2, a sensor pipe 3 and a glidge circuit 6. In addition, there is provided with a mass flow malfunction detecting element 13 which compares flow measured values out of each amplification correcting part 7 comprised in these flow measuring parts A and A and detects a mass flow malfunction. Accordingly, the mass flow malfunction is detectable by the flow measured value, so that slippage failure in the actual flow rate to the set value due to the clogging of a sensor part is checkable.</p> |
