| 摘要 |
PURPOSE:To obtain the linearly inclined magnetic field and the stigmatic image formation by rotating and inclining a pair of magnetic pole pieces having parallel planes cut on both sides with the fixed radius of curvature in the opposite directions respectively in a Wien filter constituting an energy analyzer. CONSTITUTION:A Wien filter used for the energy analysis of an electron beam or the like is constituted so that the beam passes through the uniform electric field and magnetic field superimposed at a right angle and is dispersed in response to the magnitude of the energy. No lens action is applied in the magnetic field direction, the beam is only expanded, and no energy dispersion occurs. Therefore, Both sides of magnetic pole pieces 1, 2 having parallel planes 5 are cut by an angle theta to provide cut faces 6, then they are rotated with the radius of curvature RO in the opposite directions to form inclined magnetic pole faces. Next, coils 3, 4 are fixed to yokes 7-10. Accordingly, the magnetic field is linearly inclined, thus the stigmatic image formation is obtained to allow the energy dispersion.
|
