| 摘要 |
PURPOSE:To replace only a ceramic plate unit when a ceramic plate is broken to continue the usage by fitting the ceramic plate unit airtightly and removably between wave guide flanges to be connected. CONSTITUTION:A ceramic plate unit 20 is inserted between flanges 26a, 27a of both wave guides 26, 27 to be connected in a wave guide airtight structure body. A cooling medium passage box 22 is coupled with a peripheral groove 22a, a cooling medium inlet pipe 23 and a cooling medium outlet pipe 24 are coupled with circular grooves 23a, 24a, and the flanges 26a, 27a are fastened by bolts 29 and bolts 30 arranged uniformly in the peripheral direction. Accordingly, when a ceramic plate 21 is abraded, only the ceramic plate unit 20 is required to be replaced, the whole airtight structure body is not required to be replaced, thus the labor and time required for the replacement can be sharply reduced.
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