发明名称 |
PRODUCTION OF BLOCK BODY FOR FIXING OPTICAL FIBER |
摘要 |
PURPOSE:To permit processing of a large quantity of blocks for fixing by forming grooves to a silicon substrate and forming the grooves to the arc shape which is nearly the same as the diameter of optical fibers. CONSTITUTION:A low melting point glass film 22 is uniformly formed on the silicon substrate 21 and in succession thereof, a pattern is formed on the low melting point glass film by a photographic process. The low melting point glass film is etched with the resist pattern as a mask and further, the silicon substrate is etched to a specified depth 23. The resist is then removed and the low melting point glass film is softened by a heat treatment so as to flow into step parts 24 formed by etching and to cover the step parts. The silicon substrate is then chipped away to a specified thickness at a width 25 slightly smaller than the width of the part not coated with the low melting point glass film 22 of the substrate 1 and the section of the groove 25 having a perpendicular section is formed to the arc shape 26 by isotropic dry etching. The substrate 1 formed in such a manner is cut to individual pieces and the optical fibers are inserted into the arc-shaped parts 26. The optical fibers are fixed in a package. The processing and production of a large quantity of the block bodies for fixing the optical fibers which can surely fix the optical fibers are thereby permitted.
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申请公布号 |
JPS63228102(A) |
申请公布日期 |
1988.09.22 |
申请号 |
JP19870061539 |
申请日期 |
1987.03.17 |
申请人 |
MATSUSHITA ELECTRIC IND CO LTD |
发明人 |
ISHIKAWA ONORI;BAN YUZABURO;TSUJII HIRAAKI;TANPO TOSHIAKI;HOSHINA JUNICHI;OTSUKA REI |
分类号 |
G02B6/42;G02B6/00 |
主分类号 |
G02B6/42 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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