发明名称 PRODUCTION OF BLOCK BODY FOR FIXING OPTICAL FIBER
摘要 PURPOSE:To permit processing of a large quantity of blocks for fixing by forming grooves to a silicon substrate and forming the grooves to the arc shape which is nearly the same as the diameter of optical fibers. CONSTITUTION:A low melting point glass film 22 is uniformly formed on the silicon substrate 21 and in succession thereof, a pattern is formed on the low melting point glass film by a photographic process. The low melting point glass film is etched with the resist pattern as a mask and further, the silicon substrate is etched to a specified depth 23. The resist is then removed and the low melting point glass film is softened by a heat treatment so as to flow into step parts 24 formed by etching and to cover the step parts. The silicon substrate is then chipped away to a specified thickness at a width 25 slightly smaller than the width of the part not coated with the low melting point glass film 22 of the substrate 1 and the section of the groove 25 having a perpendicular section is formed to the arc shape 26 by isotropic dry etching. The substrate 1 formed in such a manner is cut to individual pieces and the optical fibers are inserted into the arc-shaped parts 26. The optical fibers are fixed in a package. The processing and production of a large quantity of the block bodies for fixing the optical fibers which can surely fix the optical fibers are thereby permitted.
申请公布号 JPS63228102(A) 申请公布日期 1988.09.22
申请号 JP19870061539 申请日期 1987.03.17
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 ISHIKAWA ONORI;BAN YUZABURO;TSUJII HIRAAKI;TANPO TOSHIAKI;HOSHINA JUNICHI;OTSUKA REI
分类号 G02B6/42;G02B6/00 主分类号 G02B6/42
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