| 摘要 |
PURPOSE:To obtain a sensor which has an extremely wide measurement range by constituting electrostatic capacity between structures which have spherical surfaces with mutually different diameters which are centered on the fulcrum of the motion of a body in motion. CONSTITUTION:A sensor main body 2 consists of two beltlike spherical stationary structures 201 and 202 which are fitted fixedly to a substrate 8 with fixtures 6 and 7 and have the spherical surfaces with mutually different diameters and a noncontacting nearly hemispherical motion structure 203 in the space between the structures. When an event to be measured is applied to a rod body 5, the rod body 5 slants around a center P in the impression direction of the event to be measured corresponding to its intensity and the motion structure 203 moves in the space A as shown by an arrow B, so that the confrontation area between the stationary structure body 201 and motion structure 203 varies according to the inclination of the rod body 5. Further, electrostatic capacitors which face each other between four electrostatic capacitors composed of stationary electrodes 205-208 and a motion electrode 213 and four electrostatic capacitors composed of stationary electrodes 209-212 and a motion electrode 213 are connected in parallel to constitute four variable electrostatic capacitors.
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