发明名称 Method of manufacturing a field effect transistor device having a multilayer gate electrode
摘要 This Schottky barrier gate field effect transistor has N+-type source and drain regions formed in the surface area of a GaAs semi-insulation substrate, a channel region formed between the source and drain regions, and a gate electrode formed on this channel region. Particularly, in this Schottky barrier gate field effect transistor, the gate electrode has a first metal portion, which is preferably in Schottky contact with the channel region, and a second metal portion, which stably affixes to the first metal portion. The first and second metal portions are fixed to an insulative portion formed on the channel region.
申请公布号 US4769339(A) 申请公布日期 1988.09.06
申请号 US19870013794 申请日期 1987.02.12
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 ISHII, TETSUO
分类号 H01L21/28;H01L21/285;H01L21/302;H01L21/3065;H01L21/338;H01L29/417;H01L29/47;H01L29/812;(IPC1-7):H01L21/265;H01L29/80 主分类号 H01L21/28
代理机构 代理人
主权项
地址