发明名称 |
BEAM EXPOSURE APPARATUS COMPRISING A DIAPHRAGM DRIVE FOR AN OBJECT CARRIER |
摘要 |
A beam exposure apparatus is set forth comprising a mechanism for displacing an object being irradiated. This mechanism involves a drive mechanism. The drive mechanism may be rigidly connected to a wall of the apparatus, and a secondary shaft of the drive mechanism is connected by a friction coupling to a part of the object carrier which is to be positioned. The drive mechanism is driven by a direct current drive motor which is powered by a pulsed direct current. The object can be thus positioned with a step accuracy of approximately 0.2 micron. Such positioning can be measured with this accuracy be means of an inductive position detector. |
申请公布号 |
DE3473085(D1) |
申请公布日期 |
1988.09.01 |
申请号 |
DE19843473085 |
申请日期 |
1984.03.20 |
申请人 |
N.V. PHILIPS' GLOEILAMPENFABRIEKEN |
发明人 |
WONDERGEM, WILLEM |
分类号 |
F16J15/50;H01J37/20;H01J37/28;H01J37/305;(IPC1-7):H01J37/20;F16H49/00;F16J15/52 |
主分类号 |
F16J15/50 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|