发明名称 Solvents for photoresist removal
摘要 The invention relates to solvent systems which are based on water-soluble amino derivatives and propylene glycol components, for removing photoresists. These solvent systems are comprised of (a) from about 10 to 100% by weight of at least one water-soluble amine of the general formula <IMAGE> in which R1, R2, R3, R4 denote H or alkyl groups n,m denote 0 to 2, and o denotes 1 to 3; and (b) from about 0 to 90% by weight of at least one water-soluble propylene glycol derivative of the general formula <IMAGE> in which R3, R4 denote H, alkyl or <IMAGE> and P denotes 1 to 3.
申请公布号 US4765844(A) 申请公布日期 1988.08.23
申请号 US19860920665 申请日期 1986.10.20
申请人 HOECHST AKTIENGESELLSCHAFT 发明人 MERREM, HANS-JOACHIM;SCHMITT, AXEL
分类号 G03C11/00;G03F7/00;G03F7/26;G03F7/42;H01L21/027;H01L21/30;(IPC1-7):C11D7/32;C09D9/04;C23D17/00 主分类号 G03C11/00
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