| 摘要 |
PURPOSE:To high accurately further high efficiently perform polishing, by applying ultrasonic vibration to polishing fluid while placing a surface to be polished and a polishing reference surface to be mutually opposed further to be relatively moved interposing a fixed gap where the polishing fluid exists interposing. CONSTITUTION:A gap 6 between a surface 1 to be polished of a workpiece 2, secured to a surface plate 17, and a polishing reference surface 5 of a tool 18 is left as adjusted to, for instance, about 3-20mum, and a device drives the workpiece 2 and the tool 18 to be rotated in a reverse direction to each other. Simultaneously jetting polishing fluid from nozzles 11..., the device, which sets a fluid level in a polishing fluid containing part 10 so as to be the reference surface 5 or higher while applies ultrasonic vibration 13 from ultrasonic oscillators 14... while jetting polishing fluid 9 into the gap 6, performs polishing. In this way, high accurate polishing can be high efficiently performed preventing the surface to be polished from deteriorating its shape accuracy.
|
