| 摘要 |
PURPOSE:To obtain a manual prober which has preferable operability by concentrically providing annular movable tracks of multiple stages, independently foming operation units arranged concentrically to be rotatable and enabling to individually mount manipulators on the movable tracks. CONSTITUTION:Manipulators 4a-4c are respectively mounted one by one on movable tracks 7-10, and dials 16-19 are operated. Since the rotations of the shafts of the dials individually rotate the tracks 7-10 through a gear mechanism, the manipulators 4a-4c integral with the tracks can be set the desired circumferential positions. Then, fine movement dials 27-29 of the respective manipulators are adjusted to finely adjust the positions of the ends of probes 26. Then, a wafer base 5 is extended to contact the probes with the desired electrode pad of the wafer. According to this structure, the rough movements can be operated only by the dials 15-19, and the fine movements can be operated only by the dials 26-29. Consequently, the positioning can be lightly and rapidly performed. |
