| 摘要 |
PURPOSE:To enable the simultaneous measurement of source currents of a plurality of IC ships on a wafer, by connecting a power source to source terminals of the IC chips in a plurality on the wafer and by impressing a voltage thereon simultaneously. CONSTITUTION:In memory IC and the like, generally, source terminals T1 of a plurality of IC chips 12 on a water are common electrically, while earth terminals T2 thereof are independent electrically. When a voltage is impressed simultaneously on the source terminals T1 of the IC chips 12 in a plurality and the earth terminals T2 of individual IC chips 12 are earthed through separate current measuring circuits 16, accordingly, the IC chips 12 in a plurality operate simultaneously. Since the respective source currents can be measured simultaneously, a time for measurement can be shortened sharply.
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