| 摘要 |
PURPOSE:To obtain a cleaning device effective for removing dusts adhered strongly to the surface modified layer of a material to be cleaned with the mixture of organic and inorganic materials by providing a medicine outlet for dissolving the surface modified layer of the material to be cleaned in a wet cleaning device, moistening the material with medicine and then wet and dry cleaning it. CONSTITUTION:A cleaning device 1 having a wet cleaner 3 for cleaning with liquid, a dry cleaner 4 for heating in an ozone atmosphere, and a conveyor for feeding a material 9 to be cleaned between the cleaners 3 and 4, and associated integrally with them has a medicine outlet for dissolving a surface modified layer of the material 9 in the cleaner 3. For example, the device 1 is composed by sequentially coupling a loader 2, the cleaner 3, the cleaner 4, a detector 5, and an unloader 6, and a tray 12 for placing the material 9 is moved in a direction of an arrow A to clean it. After the cleaner 3 dissolves to remove the layer of the material 9 with the medicine discharged from a medicine nozzle, it separates to remove inorganic dusts with cleanser.
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