| 摘要 |
PURPOSE:To accurately measure the diameter of a columnar body to be measured by projecting light on two glass plates between which the columnar body to be measured is interposed, and measuring intervals of interference fringes formed by its reflected light. CONSTITUTION:A reference body 5 whose thickness is already known and the columnar body 6 to be measured are interposed between a 1st glass plate 3 and 2nd glass plate 4. The single-wavelength light from a light source 1 is made incident on those 1st and 2nd glass plates through a half-mirror 10. This incident light is reflected by the 2nd glass plate 4, and transmitted through the 2nd glass plate 4 and reflected by the 1st glass plate 3, so that both reflected light beams interfere with each other and are inputted to an image sensor 7. An interval measuring means 8 measure light or dark fringe intervals of the interference fringes of said interference light. A diameter arithmetic means 9 computes the diameter R of the columnar body 6 to be measured according to said interval values.
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