发明名称 ANALYSIS OF COMPOSITION OF THIN FILM
摘要 PURPOSE:To directly analyze the compsn. distribution of the metal and nonmetal at the boundary face of a thin film by stripping the thin film formed on a substrate from the substrate. CONSTITUTION:Gold is formed on the surface of the thin film in direct contact with the plastic substrate 1 by a sputtering method to form a protective film 3. An epoxy adhesive agent is coated as a lining material layer 4 in the case of stripping the thin film from the substrate on the protective film 3 by using a brush. After the adhesive agent data sets completely, the test piece consisting of such epoxy adhesive agent, the protective to prepare a test piece for compsn. analysis by an AES method. The thin film is the film contg. the metal and nonmetal of four elements shown by B, C, D, E.
申请公布号 JPS63172939(A) 申请公布日期 1988.07.16
申请号 JP19870004086 申请日期 1987.01.13
申请人 DAICEL CHEM IND LTD 发明人 MURATA MASAHIKO;MITA KENJI
分类号 G01N1/04;G01N1/28;G01N23/227 主分类号 G01N1/04
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