发明名称 Process for the plasma purification of divided silicon.
摘要 <p>1. Process for purifying divided silicon by melting the said silicon under a hot plasma obtained by high-frequency excitation of plasma-forming gas, characterized in that, in a first stage, melting of th divided silicon is produced, the plasma-forming gas consisting of a mixture of 1 to 100 % hydrogen and of 99 % to 0 % of argon, and in that, in a second stage, the molten silicon originating from the first stage is treated with a plasma whose plasma-forming gas consists of a mixture of argon, hydrogen and oxygen, the proportion of oxygen in the mixture being between 0.005 % and 0.05 % and that of hydrogen between 1 and 99.995 %.</p>
申请公布号 EP0274283(A1) 申请公布日期 1988.07.13
申请号 EP19870400022 申请日期 1987.01.08
申请人 RHONE-POULENC CHIMIE 发明人 AMOUROUX, JACQUES;MORVAN, DANIEL
分类号 C01B33/037;(IPC1-7):C01B33/02;C30B13/06;C30B13/22 主分类号 C01B33/037
代理机构 代理人
主权项
地址