| 摘要 |
PURPOSE:To reduce the hysteresis of the output of a sensor even when measured pressure increases and to precisely measure the pressure by providing amorphous magnetic alloy so that its roll surface contacts a nonmagnetic disk. CONSTITUTION:An amorphous magnetic alloy disk 2 which has magnetic striction is provided on a columnar soft magnetic body 1 where an annular groove 1a is formed. Then, the disk 2 is arranged having its roll surface opposite the soft magnetic body 1. A spacer is made of a nonmagnetic alloy disk 3 interposed between the soft magnetic body 1 and amorphous magnetic alloy disk 2. Further, a coil 6 is wound in the groove 1a of the soft magnetic body 1 and put in a container 7. Then, variation in magnetic permeability due to the internal stress of the amorphous magnetic alloy generated by the pressure is detected 8 at a part corresponding to the groove part 1a of the soft magnetic body 1 to measure the pressure. Consequently, even if the measured pressure increases, the hysteresis of the sensor output is reduced and the pressure is precisely measured.
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