发明名称 ORGANIC THIN FILM FORMING DEVICE
摘要 PURPOSE:To obtain hetero-structured film of good quality, by providing a partition part partitioning a 1st area where an ampliphilic organic monomolecular film is developed in a water tank from a 2nd area where a different monomolecular film is developed, moving a base plate up and down, and transferring the base plate between both areas. CONSTITUTION:The 1st area A where a monomolecular film is developed and the 2nd area where a monomolecular film different from said monomolecular film or no monomolecular film is developed are provided in the water tank 1 for developing amphiphilic monomolecular films. And the area A and the area B are partitioned by the partition part 60 consisting of a revolving boss 61, a revolving holder 62, a partition plate 63, fixing metals 64, a pressurizing plate 65 and a sealing spring 66, etc. And, a base plate vertical drive means moving a base plate 20 up and down inoder to stick the monomolecular film to the base plate 20 and a base plate transfer means transferring the base plate 20 between the areas A and B are provided. As a result, a hetero-structure film of good quality is formed.
申请公布号 JPS63162059(A) 申请公布日期 1988.07.05
申请号 JP19860308275 申请日期 1986.12.26
申请人 TOSHIBA CORP 发明人 YASUDA SATOSHI;WAKAYAMA SHIGERU;MIURA AKIRA
分类号 B01J19/00;B05C3/02;B05D1/20;H01L21/368;H01L51/05;H01L51/40 主分类号 B01J19/00
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