发明名称 METHOD FOR GROWING ZINC SELENIDE
摘要 PURPOSE:To improve the surface condition of the title grown zinc selenide and to improve its electrical and optical characteristics, by growing ZnSe on a semiconductor substrate with use of the org. compds. of Zn and Se, and further growing ZnSe thereon with use of H2Se instead of the org. Se compd. CONSTITUTION:The org. Zn compd. (e.g., dimethylzinc) is allowed to react with the org. Se compd. (e.g., dimethylselenium) to grow ZnSe on the semiconductor substrate. The org. Zn compd. (e.g., dimethylzinc) is then allowed to tract with H2Se to grow a ZnSe crystal film having excellent electrical and optical characteristics on the flat surface.
申请公布号 JPS63156097(A) 申请公布日期 1988.06.29
申请号 JP19860302037 申请日期 1986.12.18
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 KAWABATA TOSHIHARU;OGAWA HARUKI;FURUIKE SUSUMU
分类号 C30B25/02;C30B29/48;H01L21/365 主分类号 C30B25/02
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