| 摘要 |
PURPOSE:To obtain a washing jig where a chip does not creep into a gap and which can be washed sufficiently by a method wherein a circular cup, a reticulated circular cup, a double ring, a lid and a hooking means, each being of the specified type, are installed. CONSTITUTION:The following are installed: a circular cup 1 whose upper part is open, where a first beam 7 is formed on its side face and at its bottom face and the corner part at the bottom face is rounded R; a reticulated circular cup 8 which is fitted into the circular cup 1 to be united, whose upper part is open and which is formed by soldering a part where a fold produced during a deep-drawing process is cut. In addition, the following are installed: a double ring 9 where an internal ring 11 is connected to an external ring 10 which is fixed to the edge of the circular cup 1 by means of more than one second beam 12; a lid to which a circular net 23 is fixed on the upper face of a ring 19, for lid use, which can be fitted to the outer circumference of the external ring 10; a hooking means 20 which can fix the ring 19, for lid use, in such a way that the ring 19, for lid use, can be detached with the ring 19 fit to the external ring 10. A substrate 17 where a wafer chip 18 is glued is put between said lid and the double ring 9. |
