PROCESS AND APPARATUS FOR TREATING WORKPIECES IN A VACUUM CHAMBER INTO WHICH A GAS IS INTRODUCED,申请号EP19800105152-传众专利搜索

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发明名称	PROCESS AND APPARATUS FOR TREATING WORKPIECES IN A VACUUM CHAMBER INTO WHICH A GAS IS INTRODUCED
摘要
申请公布号	EP0026337(B2)	申请公布日期	1988.06.15
申请号	EP19800105152	申请日期	1980.08.29
申请人	INTERNATIONAL BUSINESS MACHINES CORPORATION	发明人	HASSAN, JAVATHU KUTIKARAN,;PAIVANAS, JOHN ANGELO
分类号	B01J19/08;B01J19/26;C23C14/34;C23F4/00;H01J37/32;H01L21/302;H01L21/3065;(IPC1-7):H01J37/32;C23F1/00	主分类号	B01J19/08
代理机构		代理人
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地址

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