METHOD OF PRODUCING A DIAPHRAGM ON A SUBSTRATE

摘要

The invention provides a method of producing on a substrate a diaphragm which is electrically isolated from the substrate. The method comprises obtaining a substrate (2) having a diaphragm(1) thereon which comprises a flexible central portion (1a) and a shouldered peripheral portion which supports the central portion (1a) above the substrate (2), applying a mask (6) over at least a part of the central portion (1a) and converting the unmasked portion (1b) of the diaphragm to a dielectric so as to electrically isolate the masked central portion (1a) of the diaphragm from the substrate (2).