发明名称 Mask for photolithographically producing a structure
摘要 In a mask for photolithographically producing a structure, in particular for producing printed circuit boards and liquid-crystal cells, an electrically conductive UV-transparent semiconductor layer, preferably an indium tin oxide (ITO) layer is applied to a glass plate. A metal layer which represents the structure to be produced is arranged on the indium tin oxide layer. Preferably, the metal layer is composed of copper. <IMAGE>
申请公布号 DE3640441(A1) 申请公布日期 1988.06.09
申请号 DE19863640441 申请日期 1986.11.27
申请人 VDO ADOLF SCHINDLING AG 发明人 WILHELM NICKOL,FRIEDRICH
分类号 G03F1/00;H05K3/00 主分类号 G03F1/00
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