| 摘要 |
PURPOSE:To prevent the generation of the crack in the recessed and protruding part between constitutional elements, by forming an abrasion resistant layer by high frequency bias sputtering. CONSTITUTION:A material having to become in abrasion resistant layer 12 is fixed to the surface opposed to an electrode 14 of an electrode 13 and a thermal head 15 forming an abrasion resistant layer is fixed to the surface opposed to the electrode 13 of the electrode 14. After a container 11 is evacuated to form an atmosphere performing high frequency bias sputtering, the high frequency bias sputtering is started. The abrasion resistant layer is laminated to the recessed part 17 formed by electrode layers 4, 4 and a heat generating resistor 3 with the elapse of time after the high frequency bias sputtering is started but the surface of the abrasion resistant layer 5 once laminated to the recessed part 17 is again shaven off by the collision of an Ar ion and the atom of the abrasion resistant layer re-discharged is dispersed to the recessed part 17 to be again adhered thereto. As a result, the generation of a crack can be prevented. Therefore, the lowering in the abrasion resistance of the abrasion resistant layer can be lowered and the abrasion resistant layer can be thinly formed. |
