| 摘要 |
A transducer for acceleration measurement is fabricated from a silicon slice and comprises four filaments (3, 4, 5 and 6) which interconnect a central support (1) with an inertial mass (2). The filaments vibrate in a common plane, their resonant frequencies being determined by any external forces applied thereto. Vibrations are sustained and detected by means of a pair of thermal resistors (RS, RD) implanted in each filament. The embodiment is configured as a 2-axis accelerometer for use in vehicle navigation and guidance systems. Piezo-electric means for sustaining and detecting vibrations of the filaments may be used instead of the thermal resistors (RS and RD). |
