| 摘要 |
PURPOSE:To prevent contact to air of an object to be processed before and after the processing by providing the main and subcontainers communicating with the processing chamber housing a boat to hold the object to be processed, constituting these two containers with a fixing capsule and a movable capsule and a setting both processing chambers to the determined atmosphere through gas replacement. CONSTITUTION:A subcontainer 15 holding a processing object 12 such as a semiconductor wafer on a susceptor boat 13 is coupled to the side of a loading chamber 18 by a flange clamp A. In this case, the processing chamber 17 is closed by a gate valve 20 and the atmosphere in the processing chamber 17 is replaced with the high vacuum atmosphere. After the susceptor boat 13 is moved to the loading chamber 18 by opening the gate valve 20, the susceptor boat 13 is moved into the processing chamber 14 of container 11 by a boat loader 19 from the loading chamber 18 of high vacuum atmosphere. As explained above, contact to air of processing object 12 can be prevented before and after the processing and thickness can be controlled accurately by replacing the atmosphereof both processing chambers 14, 17 with the determined atmosphere through gas replacement.
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