INSPECTION EQUIPMENT FOR PACKAGED SUBSTRATE

摘要

PURPOSE:To prevent a diffuse reflected light component from entering in an image and to prevent respective images from being distorted by performing polarized light image pickup operation while lighting a substrate with polarized light. CONSTITUTION:A lighting part 12 generates polarized illumination light through a polarizing filter 18 from light from a white light source 20 which is controlled with the control signal of a processing part 16. While substrates 10a and 10b set on an X-Y table 19 are lighted with the polarized illumination light emitted by the lighting part 12, their images are picked up by an image pickup part 15 equipped with a color TV camera 21 and the polarizing filter 11 which are controlled with the control signal from the processing part 16. The images obtained by the image pickup part 15 are never distorted even if there is a part where diffuse reflection is easily caused on the surfaces of the substrates 10a and 10b, the surfaces of components 13a and 13b on the substrates, etc.