| 摘要 |
PURPOSE:To produce a uniform vertical magnetized film for a long time by providing a vertical magnetized film consisting of a composition of Co-15-50at%O on a nonmagnetic base material surface directly or through a soft magnetic thin film layer. CONSTITUTION:A rotary cooling can 2 and an electron beam evaporation source 3 just below the can 2 are provided in a vessel 1 connected on the vacuum pump side, and a winding roller 4 and a take-up roller 5 are arranged on both sides of them above them, and the circumferential face of the cooling can 2 is turned and run in accordance with turning of the roller 4 to wind a nonmagnetic base material such as a roll-shaped PET tape base material (a), which is wound around the roller 4, around the roller 5. A supply tube 6 through which oxigen is introduced into the vessel 1 is provided. After air in the vessel 1 is discharged up to <=1X10<-5>torrs. evaporation materials (b), namely, Co is evaporated in a certain speed by electron beam heating, and gaseous O2 is introduced from the supply tube 6 on the other hand, and Co is vapor-deposited vertically to the surface of the tape base material (a) running in a certain speed to obtain a Co-O deposited film. |
