| 摘要 |
PURPOSE:To form quickly a tin oxide film having less haze and excellent conductivity on the surface of a base body at a prescribed thickness by bringing the vapor of monobutyltin trichloride added with a specific fluorine compd. into contact with the surface of the base body heated to a specific temp. CONSTITUTION:C4H9SnCl3 is heated to about 40-90 deg.C in an evaporator 1 to generate the vapor thereof. Said vapor is fed with the gaseous N2 adjusted to a pressure of about 1kg/cm<2> by a compressor 2 and a reducing valve 3 as a carrier gas into a mixer 4. XCHF2 (where X is hydrocarbon group consisting of C and H or Cl, or F) is fed as a dopant from a bomb 5 into said mixer 4 through a reducing valve 3', a flowmeter 7, a piping 6, etc. and is mixed by a fan 9 so as to be added to the above-mentioned vapor of C4H9SnCl3. Said vapor is ejected onto the surface of a base body 11 of glass or the like heated to a high temp. of about 520 deg.C from a slit-shaped ejecting port 10 at a discharging rate of about <=15m/sec. A tin oxide film is thus formed on the body 11 by thermal decomposition and oxidation reaction.
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