| 摘要 |
PURPOSE:To discriminate a discharge state and to exactly grasp normal glow discharge, by passing a plurality of probe lights through respective discharge regions in a discharge tube and receiving the lights by their corresponding light receiving means and measuring changes in the respective light-receiving signals. CONSTITUTION:Glow discharge does not occur vertically between main discharge electrodes 10 and 11, but it occurs in the form of a little its bulging between the main discharge electrodes 10 and 11. Subsequently, it looks like a small convex lens is generated between the main discharge electrodes 10 and 11, signals from a probe light detector 6 receiving probe lights 3 change so as to become larger on only the part where the main discharge occurs. When the change G-2 toward which the signals become larger is gasped, presence of normal main discharge can be exactly measured. |
