| 摘要 |
A process of fabricating a semiconductor device comprising the steps of forming a dielectric layer overlying a doped semiconductor layer, forming a first insulator layer on the dielectric layer, etching the dielectric layer and the insulator layer to form a bump region comprising coextensively patterned portions of the dielectric and insulator layers, forming a second insulator layer partly on the doped semiconductor layer and partly on the bump region, conformally forming on the second insulator layer an undoped polycrystalline semiconductor layer having a step portion, forming on the polycrystalline semiconductor layer a planarizing layer covering the step portion of the polycrystalline semiconductor layer, etching back the polycrystalline semiconductor layer and the planarizing layer until the second insulator layer has a surface portion exposed over the bump region, etching the first and second insulator layers with the remaining portion of the polycrystalline semiconductor layer used as a mask for forming an opening in part extending to the surface of the dielectric layer and having a marginal groove portion extending to the surface of the doped semiconductor layer, and thereafter forming various desired device regions through and in alignment with this opening.
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