| 摘要 |
PURPOSE:To obtain homogeneous and high-quality quartz glass by drying the specified wet gel to produce dry gel and holding this gel at prescribed temp. and thereafter sintering it. CONSTITUTION:Wet gel is produced by allowing a sol soln. obtained by mixing both a first soln. contg. fine silica particles which are obtained by hydrolyzing alkylsilicate with a basic reagent and a second soln. which is obtained by hydrolyzing alkylsilicate with an acidic reagent to gel. Then after drying the above- mentioned wet gel to produce dry gel, this dry gel is subjected to pretreatment holding it at 300-500 deg.C for 10hr or more and sintered to obtain aimed glass. By the above-mentioned production, the amount of ammonium chloride incorporated in a sample is decreased and foaming which is resulted from ammonium chloride as a cause can be made difficult-to be generated. Further obtained quartz glass is extremely high quality and can be applied as a photomask base plate for an IC and optical fiber or the like. |
