| 摘要 |
PURPOSE:To increase the adhesive strength on a substrate without deterioration in magnetic characteristics by a method wherein the crystallization temperature of the amorphous alloy magnetic thin film to be laminated on the substrate is made higher than that of the amorphous alloy magnetic thin film to be laminated on the abovementioned thin film. CONSTITUTION:As the first amorphous alloy magnetic thin film 2 has a low degree of saturated magnetic flux density Bs and a high crystallization temperature, a heat treatment can be performed at a sufficiently high temperature after formation of the film, the coupling strength between a substrate 1 and the film 2 is increased, and the adhesive properties can be improved. After a heat treatment has been performed, the second amorphous alloy magnetic thin film 3, having a high degree of Bs and a low crystallization temperature, is formed. A mutual diffusion is easily generated on the interface of said amorphous alloy magnetic thin films 2 and 3, and sufficient adhesive strength can be obtained. As a result, the amorphous alloy magnetic thin film, consisting of the amorphous alloy magnetic thin films 2 and 3, can be adhered to the substrate 1 with sufficient strength. The BS of the entire amorphous alloy magnetic thin films can be made larger in size by increasing the thickness of the amorphous alloy magnetic thin film 3. |
