| 摘要 |
PURPOSE:To prevent the infiltration of the harmful atmosphere into a vacuum treating chamber by providing freely attachable and detachable vacuum treating chamber and purging container in succession so that a vacuum valve is positioned in the other opening of the freely movable purging container. CONSTITUTION:A material to be treated is placed on a pallet 8 through the flexible curtain 6 of the purging container 5, and purge gas is discharged from purge gas discharge equipment 10 to replace the atmosphere in the container 5 with the purged gas. The vacuum valve 4 provided to the vacuum treating chamber 1 is opened, and transport equipment 9 is lifted up and down and rotated to transport the material to be treated on the pallet 8 in the purging container 5 into the vacuum treating chamber 1 through an inlet and outlet port 14. The vacuum valve 4 is then closed, the inside of the treating chamber 1 is evacuated to a desired vacuum by an exhauster 2, and then the material is treated in the vacuum treating chamber 1. |
