| 摘要 |
PURPOSE:To obtain flat and dense film having specific property by allowing solid powder particles accelerated to high velocity to collide with the surface of an object to be processed using an electrostatic method. CONSTITUTION:Agglomerated mass of particles or a single particle separated by the effect of electric field are (is) moved reciprocally between electrodes provided by arranging parallel flat plate electrodes 13, 14 to face each other in vacuum. Simultaneously, a high voltage electric field is formed by impressing high voltage to the electrodes 13, 14 to charge and accelerate above-described solid powder particles 1. Solid thin film 3 is formed by impacting and sticking said charged and accelerated powder particles 2 on the surface of an object 4 to be processed. By this method, flat and dense film having specific property is obtd. |
