| 摘要 |
<p>PURPOSE:To enable an automatic conveying system, which can feed a conveyed object to be transferred while holding its high purity, to be formed, by providing plural chambers communicating with an air circulating path and comprising a conveying chamber, coming into contact through a filter, and a supply air chamber generating an air pressure higher than that of the conveying chamber. CONSTITUTION:Air is fed by a fan 1 to a feed air duct part 17, and the air, which passes through a HEPA filter 2 being purified, is fed to a main tunnel part 20. And a conveying system, in which an arm part of a horizontal conveying truck 3 mounting a magazine 9 of conveyed object moves in the inside of the tunnel part 20 by a driving roller 4, feeds the air via a punching 5 to a recirculating duct part 18 again to the feed air duct part 17 by the fan 1. While the magazine 9 is held by meshing its recessed parts 12 with supporting arms 11 of a vertical conveying truck 8, and the magazine 9 held to supporting arms of the truck 3 if the arm of the truck 8 is removed from the magazine 9 when the supporting arms of the trucks 8, 3 are on the same plane to the recessed surface of the magazine 9. Next the magazine 9 moves in a horizontal direction as shown by an arrow head in the drawing.</p> |
