| 摘要 |
PURPOSE:To facilitate the cleaning of a holder by forming a plurality of projecting parts which constitute a loading part for a substrate in a recessed part and forming the second recessed part whose depth is less than that of the recessed part onto the projecting stripe part. CONSTITUTION:On the surface of a holder 1, a sealing part 2 in the closed loop which divides the loading surface region for a substrate illustrated by a wafer 10 and the first recessed part 7 in concentric circular form which is enclosed inside the sealing part 2 so as to form a plurality of projecting stripe parts 6 are formed. A linear loading part 8 is formed intermittently by the second recessed part 9 extending in the radial direction. The depth of the second recessed part 9 is less than the first recessed part 7, and the width of the second recessed part 9 is uniform to facilitate cutting work. Therefore, the peripheral length on the surface of the loading part 8 is longer towards the outer peripheral side, and an intake hole 5 communicating to a vacuum means is opened onto the bottom part of the first recessed part 7 having a large groove depth. |
