| 摘要 |
PURPOSE:To prevent dust, etc. adhering to wall surfaces or floating from being induced to the center part of a clean room so as not to reduce clean performance by installing properly impingement faces for air flow in the vertical direction at the peripheral edge part of a ceiling face. CONSTITUTION:At a clean room with complete laminar flow where lattice- shaped ceiling frames 1 reaching a circumferential wall A are installed at a ceiling and on each square of the ceiling frames each high performance filter 2... is equipped, a hanging wall 5 of which height is five times or more larger than the width of a frame member is vertically installed. The wall surfaces of the wall 5 and the wall A are constituted by non-chargeable material (electrically conductive material). The turbulent flow region nearby the wall is isolated from the turbulent region generated by the ceiling frames or filter frame parts and locating just under them and the inducement of dust, etc. to the center part of the clean room is prevented. |
