发明名称 MOS semiconductor device.
摘要 <p>This invention provides a MOS semiconductor device having submicron transistor, including a semiconductor substrate (40) of a first conductive type, and having a predetermined power source voltage applied thereto, comprising a gate insulation layer (46) on the semiconductor substrate (40); a gate electrode (47) on the gate insulation layer (46); impurity regions (43) of a second conductive type in the semiconductor substrate (40) and adjacent to the gate electrode (47) and the gate insulation layer 46), the device substantially satisfying the equation 0.9V &lt; 6.2 x (L/2) &lt; 1.1V, where V is the power source voltage in volts, and L is the length of the gate electrode (47) in microns. When the impurity regions have a first impurity regions (13) and a second impurity regions (14) having a higher concentration than that of the first impurity regions (13), the device is substantially satisfied the alternative equation 0.9 V &lt; 8.4 x (L/2) &lt; 1.1 . e</p>
申请公布号 EP0264242(A2) 申请公布日期 1988.04.20
申请号 EP19870308978 申请日期 1987.10.09
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 KAKUMU, MASAKAZU C/O PATENT DIVISION
分类号 H01L21/8234;H01L21/336;H01L27/088;H01L29/10;H01L29/78;(IPC1-7):H01L29/78 主分类号 H01L21/8234
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