| 摘要 |
PURPOSE:To make a flattened film thin and to smooth the film, by applying light sensitive and transmitting dye-resisting macromolecular film having a specified thickness on the irregular part of a optoelectric transducer part, and performing photolithography treatment for the macromolecular film on the protruding parts. CONSTITUTION:An optoelectric transducer part having irregularities consists of a P-N junction photodiode 101, a thermal oxide film 102, a deposited oxide film 103 and the like on a substrate 100. A light sensitive and transmitting dye-resisting macromolecular film 104 is applied on the transducer part to a thickness less than the part corresponding to the irregularities. Black parts 105 corresponding to the protruding parts are provided on a photomask 106. Light is projected through the photomask 106. A part other than the parts corresponding to the protruding parts of the film 104 is hardened. Then the parts corresponding to the protruding parts of the film 104 are developed and removed by a photolithography method. Then the flattened film is made thin, and the surface of the solid-state image sensing element having the irregularities is smoothed. The spectroscopic characteristic of a color filter is enhanced, and the high-quality color solid-state image sensing element is obtained. |
