| 摘要 |
PURPOSE:To form a uniform film small in an amount of a substrate and the film to be etched, by applying an electric field to a substrate, accelerating excited gaseous H, and decomposing a carbon to deposit it on the substrate. CONSTITUTION:The electrophotographic sensitive body is formed by laminating on a substrate 1-1 a charge generating layer 1-2 and the charge transfer layer of a film composed essentially of carbon formed by using a carbon containing gas and the H gas, applying an electric field to accelerate the excited H gas, and decomposing the carbon-containing gas to deposit C on the substrate 1-1. This transfer layer, preferably, has an optical band gap of >=1.5eV, an H concentration of <=40atom%, and an electric conductivity of 10<-8>OMEGA<-1>cm<-1>, thus permitting the obtained electrophotographic sensitive body to be given god acceptance potential and photosensitivity with a small amount of energy at low temperature. |
