SPUTTERING TARGET OF MAGNETRON SPUTTERING DEVICE,申请号JP19860216651-传众专利搜索

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发明名称	SPUTTERING TARGET OF MAGNETRON SPUTTERING DEVICE
摘要
申请公布号	JPS6372873(A)	申请公布日期	1988.04.02
申请号	JP19860216651	申请日期	1986.09.12
申请人	MATSUSHITA ELECTRIC IND CO LTD	发明人	MURAKAMI MOTOYOSHI;UCHIDA KIYOSHI;KAWABATA HIDEJI;KUDO YOSHIHIKO
分类号	C23C14/34;C23C14/35;C23C14/36	主分类号	C23C14/34
代理机构		代理人
主权项
地址

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